Brooks - Fixload

igus® energy supply systems are a part of Brooks' clean room technology

The company Brooks needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300 mm wafer processing equipment in the semiconductor manufacturing. As the wafers to be processed are exposed to the environment while loading, the clean room capability of the used energy supply system is, among others, very important here.

Tests by Brooks have shown that wearout of the igus® energy supply system was not determined even in the long-term test. A Zipper e-chain® is used in hanging installation position. At a travel distance of 290 mm, a number of 50-60 cycles per hour is attained mostly in the three-shift operation.

Other advantage:
The patented zipper system enables a filling with energy cables at lightning speed and additional protection. This increases the operating safety and the holding times.